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https://open.uns.ac.rs/handle/123456789/15567| Title: | Microstructural studies of TiN coatings prepared by PVD and IBAD | Authors: | Škorić, Branko Kakaš D. Bibic N. Rakita M. |
Issue Date: | 20-Sep-2004 | Journal: | Surface Science | Abstract: | Titanium nitride (TiN) films have been deposited by physical vapour deposition (PVD), with BALZER equipment, and ion beam assisted deposition (IBAD) process, in DANFYSIK chamber. TiN thin films were grown, during IBAD process, by evaporation of Ti in presence of N2 and simultaneous bombarded with Ar+ ions. The evolution of the microstructure from porous and columnar grains to densel packed grains is accompanied by changes in mechanical and physical properties. © 2004 Elsevier B.V. All rights reserved. | URI: | https://open.uns.ac.rs/handle/123456789/15567 | ISSN: | 396028 | DOI: | 10.1016/j.susc.2004.06.060 |
| Appears in Collections: | FTN Publikacije/Publications |
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