Please use this identifier to cite or link to this item: https://open.uns.ac.rs/handle/123456789/15567
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dc.contributor.authorŠkorić, Brankoen
dc.contributor.authorKakaš D.en
dc.contributor.authorBibic N.en
dc.contributor.authorRakita M.en
dc.date.accessioned2020-03-03T15:00:28Z-
dc.date.available2020-03-03T15:00:28Z-
dc.date.issued2004-09-20en
dc.identifier.issn396028en
dc.identifier.urihttps://open.uns.ac.rs/handle/123456789/15567-
dc.description.abstractTitanium nitride (TiN) films have been deposited by physical vapour deposition (PVD), with BALZER equipment, and ion beam assisted deposition (IBAD) process, in DANFYSIK chamber. TiN thin films were grown, during IBAD process, by evaporation of Ti in presence of N2 and simultaneous bombarded with Ar+ ions. The evolution of the microstructure from porous and columnar grains to densel packed grains is accompanied by changes in mechanical and physical properties. © 2004 Elsevier B.V. All rights reserved.en
dc.relation.ispartofSurface Scienceen
dc.titleMicrostructural studies of TiN coatings prepared by PVD and IBADen
dc.typeConference Paperen
dc.identifier.doi10.1016/j.susc.2004.06.060en
dc.identifier.scopus2-s2.0-4544325212en
dc.identifier.urlhttps://api.elsevier.com/content/abstract/scopus_id/4544325212en
dc.relation.lastpage44en
dc.relation.firstpage40en
dc.relation.issue1-3 PART 1en
dc.relation.volume566-568en
item.grantfulltextnone-
item.fulltextNo Fulltext-
crisitem.author.deptFakultet tehničkih nauka, Departman za proizvodno mašinstvo-
crisitem.author.parentorgFakultet tehničkih nauka-
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