Performance improvement of RF inductors using LTCC technology

Abstract

This paper presents for the first time a parallel comparison of the performance of RF inductors realized on different substrate configurations. Presented inductors are meander type structures fabricated in Low Temperature Co-fired Ceramic (LTCC) technology. Also, chosen material is never before implemented for inductor fabrication. The performance improvement is achieved by design optimization of different substrate configurations that incorporate placement of an air-gap beneath the inductor and/or introduction of an additional shielding layer on the top. Designed structures are characterized on the basis of simulation and experimental data, achieving good correlation between obtained results. Presented results show over 30 % increase in quality factor and widening of the operating frequency range by over 55 %. © Copyright Honeywell Federal Manufacturing & Technologies LLC, 2011.