Parameters governing the sensor characteristic of capacitive temperature sensors built up in LTCC-technology

Abstract

The material properties (TCE, dielectric number, etc.) ofdifferent LTCC (L.ow [empercuure f;.o-fired f;.eramics) - tape materials were characterized separately and compared to the behavior of combinations ofthese tapes that were laminated and co-fired. The effects ofdifferent values ofthermal expansion and change in dielectric number ofthe combined material stacks have been investigated by finite element analyses and verified using a wireless readout resonant temperature sensor as a demonstration device.