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https://open.uns.ac.rs/handle/123456789/10709
Назив: | Duplex hard coatings with aditional ion implantation | Аутори: | Škorić, Branko Kakaš D. Favato G. Miletić A. Arsenović, Marko |
Датум издавања: | 16-мар-2012 | Часопис: | Applied Mechanics and Materials | Сажетак: | In this paper, we present the results of a study of TiN thin films which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N2+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films.. A variety of analytic techniques were used for characterization, such as scratch test, calo test, Scanning electron microscopy (SEM), Atomic Force Microscope (AFM), X-ray diffraction (XRD) and Energy Dispersive X-ray analysis (EDAX). © (2012) Trans Tech Publications, Switzerland. | URI: | https://open.uns.ac.rs/handle/123456789/10709 | ISBN: | 9783037853801 | ISSN: | 16609336 | DOI: | 10.4028/www.scientific.net/AMM.157-158.1320 |
Налази се у колекцијама: | FTN Publikacije/Publications |
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