Please use this identifier to cite or link to this item: https://open.uns.ac.rs/handle/123456789/10709
Title: Duplex hard coatings with aditional ion implantation
Authors: Škorić, Branko 
Kakaš D.
Favato G.
Miletić A.
Arsenović, Marko 
Issue Date: 16-Mar-2012
Journal: Applied Mechanics and Materials
Abstract: In this paper, we present the results of a study of TiN thin films which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N2+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films.. A variety of analytic techniques were used for characterization, such as scratch test, calo test, Scanning electron microscopy (SEM), Atomic Force Microscope (AFM), X-ray diffraction (XRD) and Energy Dispersive X-ray analysis (EDAX). © (2012) Trans Tech Publications, Switzerland.
URI: https://open.uns.ac.rs/handle/123456789/10709
ISBN: 9783037853801
ISSN: 16609336
DOI: 10.4028/www.scientific.net/AMM.157-158.1320
Appears in Collections:FTN Publikacije/Publications

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