Mоlimо vаs kоristitе оvај idеntifikаtоr zа citirаnjе ili оvај link dо оvе stаvkе:
https://open.uns.ac.rs/handle/123456789/9735
Nаziv: | Parameters affecting the sensitivity of LTCC pressure sensors | Аutоri: | Radosavljević, Goran Smetana W. Marić, Andrea Živanov, Ljiljana Unger M. Stangl G. |
Dаtum izdаvаnjа: | 25-нов-2010 | Čаsоpis: | Microelectronics International | Sažetak: | Purpose - The purpose of this paper is to demonstrate the influence of material properties and fabrication technique on the performance of an embedded pressure sensor. Based on conducted theoretical analysis a suitable material and technological technique that gave the best behavior of designed sensor was chosen for its fabrication. This is verified on the example of a resonant pressure sensor, designed for operation in the MHz range. Design/methodology/ approach - A sensor module is fabricated using the low temperature co-fired ceramics (LTCC) technology and sputtering technique for electrodes deposition. Themodule comprises an inductor connected with a variable capacitor formed by the sensor membranes in a parallel LC circuit. An extensive parallel analysis of sensors performance for sensors with thick film (screen-printed) and thin film (sputtered) electrodes is demonstrated. Mechanical and electrical parameters (Young's modulus and permittivity) of different tape materials that are considered for sensor fabrication are determined at room temperature. Findings - Implementation of the sputtering technique for deposition of the thin film electrodes and usage of tapes with higher elasticity significantly contribute to the increase of the sensor performance (improved sensitivity) compared to designs found in available literature. Experimentally attained results are compared with the ones obtained by analytical calculationsachieving good agreement of obtained results. Originality/value - Theimprovement of sensor sensitivity by means of evaluation of differenttape material and electrode thickness reduction is demonstrated for the first time. The presented results of the sensor equivalent model and the sensor-antenna system are in good compliance with experimentaldata determined through measurement. © Emerald Group Publishing Limited. | URI: | https://open.uns.ac.rs/handle/123456789/9735 | ISSN: | 13565362 | DOI: | 10.1108/13565361011061975 |
Nаlаzi sе u kоlеkciјаmа: | FTN Publikacije/Publications |
Prikаzаti cеlоkupаn zаpis stаvki
SCOPUSTM
Nаvоđеnjа
6
prоvеrеnо 09.09.2023.
Prеglеd/i stаnicа
20
Prоtеklа nеdеljа
15
15
Prоtеkli mеsеc
0
0
prоvеrеnо 03.05.2024.
Google ScholarTM
Prоvеritе
Аlt mеtrikа
Stаvkе nа DSpace-u su zаštićеnе аutоrskim prаvimа, sа svim prаvimа zаdržаnim, оsim аkо nije drugačije naznačeno.