Capacitive displacement sensor embedded in LTCC packaging

Abstract

This paper presents the development of capacitive displacement sensor comprised of a movable dielectric stick and a fixed capacitor with a micro channel. Movement of the stick causes change of the sensor capacitance and therefore enables detection of the stick displacement in the plane. Electrical and mathematical sensor model have been developed. The sensor has been fabricated in the Low Temperature Co-fired Ceramics (LTCC) technology and experimentally characterized. © 2012 IEEE.