Methods for performance improvement of LTCC capacitive displacement sensor

Abstract

This paper presents two methods for improving performance of capacitive displacement sensor which is comprised of a movable dielectric stick and a fixed LTCC capacitor with micro channel. Preliminary tests were done with in house developed software tool which is based on previously developed theoretical and mathematical model. Two types of simulations have been performed: simulation with changes of sensor's geometrical parameters and simulation with changes in the permittivity values of movable dielectric stick. Parameters obtained by simulations are applied during the sensor fabrication. Fabricated capacitive displacement sensor with improved characteristic is characterized and obtained measurement results are compared with results obtained by simulations. © 2013 IEEE.