Realization of high quality RF inductors using LTCC technology

Abstract

This article offers a detail description of design, simulation, fabrication and characterization of buried inductors on two different substrate configurations intended for application in the radio frequency range. The presented inductors are meander type structures fabricated using LTCC (Low Temperature Co-fired Ceramic) technology. Different substrate configurations incorporate placement of an air-gap beneath the inductor. Obtained results present over 25% increase in quality factor and widening of the operating frequency range by over 45% in comparison with inductors on standard substrate configurations. © 2011 IEEE.