Benefits of the LTCC substrate configuration with an air-gap for realization of RF inductor with high Q-factor and SRF

Abstract

This article offers a detail description of design, simulation, fabrication and characterization of inductors on different substrate configurations intended for application in radio frequency range. The presented inductors are meander type structures fabricated using low temperature co-fired ceramic technology. Different substrate configurations incorporate placement of an air-gap beneath the inductor. Obtained results present over 30% increase in quality factor and widening of the operating frequency range by over 55% in comparison with inductors on standard substrate configurations. © 2011 American Ceramic Society.