Micro force sensor fabricated in the LTCC technology

Abstract

This paper presents resonant force sensor designed for the operation in the MHz range and for 0 to 6 N load. The LTCC technology is implemented for the sensor fabrication and a wireless readout of the measured data is provided. Used LTCC tape is characterised in order to demonstrate its mechanical and electrical properties at room temperature. Also, theoretical model of the sensor is developed to predict its behaviour. Fabricated sensor performance is experimentally characterised and obtained results are in good agreement with the ones derived from the presented theoretical model. © 2010 IEEE.