Processing of ferroelectric thin layers of barium titanate by the sol-gel method

Abstract

The influence of various processing parameters is investigated during sol formation (metal precursors: titanium (IV) butoxide, barium hydroxide, barium acetate; pH of sol solution; type and amount of stabiliser and solvent; amount of water) and on the properties of the resulting gel. A relationship is established between sol-gel structure and the temperatures of BaTiO 3 crystallisation and the structured evolution of layers deposited on the substrate Si (100). Experiments revealed the stable and suitable BaTiO 3 sol structures, responsible for low temperature crystallisation of BaTiO 3 . The IR, DTA and XRD analysis provide sample characterisation. The obtained results show that by using titanium (IV) butoxide and barium hydroxide monohydrate may be obtained a thin BaTiO 3 layer at the low crystallisation temperatures, between 600 and 700°C, with only the tetragonal phase of barium titanate present.