Please use this identifier to cite or link to this item: https://open.uns.ac.rs/handle/123456789/27474
Title: Spatial and Time Characteristics of Low Temperature RF Plasma for Materials Processing
Authors: Djurović Stevica 
Roberts R
Olthoff J. K
Issue Date: 1993
Journal: XVI Summer School and International Symposium on the Physics of Ionized gases Contributed Papers and Abstracts of invited lectures and progress reports, 16th Summer School and International Symposium on the Physics of Ionized gases, Belgrade, Yugoslavia, 1993, No 16
URI: https://open.uns.ac.rs/handle/123456789/27474
ISBN: 86-80055-46-8
Appears in Collections:PMF Publikacije/Publications

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