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https://open.uns.ac.rs/handle/123456789/27474
Title: | Spatial and Time Characteristics of Low Temperature RF Plasma for Materials Processing | Authors: | Djurović Stevica Roberts R Olthoff J. K |
Issue Date: | 1993 | Journal: | XVI Summer School and International Symposium on the Physics of Ionized gases Contributed Papers and Abstracts of invited lectures and progress reports, 16th Summer School and International Symposium on the Physics of Ionized gases, Belgrade, Yugoslavia, 1993, No 16 | URI: | https://open.uns.ac.rs/handle/123456789/27474 | ISBN: | 86-80055-46-8 |
Appears in Collections: | PMF Publikacije/Publications |
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