Tribological Behavior of TiN and TiAIN Deposited on Substrates Plasma Nitrided at Low Pressure

Abstract

Binary and ternary compounds of TiN and (Ti,Al)N were deposited by magnetron sputtering over low pressure plasma nitrided layer. Tribological behavior under dry-sliding conditions was evaluated with pin-on-ring test machine. The significant process parameters, friction coefficient and contact temperature, were checked with a modern measurement line that includes computer for acquisition and processing of data and monitoring the wear process. The wear zone morphology and characteristics of surface layer structure as well as important properties were investigated by scanning electi electron microscopy (SEM). Energy-dispersive x-ray analysis (EDAX) of the wear-scars on pins provided essential information on the wear characteristics. Based on all results the correlation between the surface structure and tribological wear characteristics were explained. It was concluded that formation of the plasma nitrided layer at low pressure, beneath a TIN and (Ti,Al)N over coating, is important in determining the use of hard coating for reducing the wear. An excellent coating to substrate adhesion and low friction coefficient was found to be significant factor influencing the use of plasma nitriding at low pressure. © 1995, Taylor & Francis Group, LLC. All rights reserved.