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https://open.uns.ac.rs/handle/123456789/12755
Title: | Scandium dipivaloyl methanate as a volatile precursor for thin film deposition. Coupling of mass spectrometer to thermobalance | Authors: | Mesaroš-Sečenji (Mészáros Szécsényi), Katalin Päiväsaari J. Putkonen M. Niinistö L. Pokol G. |
Issue Date: | 26-Aug-2002 | Journal: | Journal of Thermal Analysis and Calorimetry | Abstract: | The coupling of a quadrupole mass spectrometer (QMS) via a heated capillary to a commercial thermogravimetric analyser is described. The amu and temperature ranges available were up to 1000 amu and 1500°C, respectively. The system was evaluated with test compounds, yielding gaseous species in the m/z range of 17-80, and then used for the study of thermal behaviour of scandium dipivaloyl methanate or Sc(thd)3 which is discussed in detail. Sc(thd)2 appears as the major Sc-containing species with m/z=411 in the gas phase at 200-300°C. | URI: | https://open.uns.ac.rs/handle/123456789/12755 | ISSN: | 14182874 | DOI: | 10.1023/A:1019929521641 |
Appears in Collections: | PMF Publikacije/Publications |
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